EBIC & RCI amplifier

We have designed an easy-to-use EBIC and RCI analysis tool which is compatible with most commercially available SEM’s and FIB’s. Our system consists of two MM3A-EM micromanipulators, at least one of which is equipped with a low-current measurement kit (LCMK-EM) and a signal amplifier. The amplifier is connected to the video input of the microscope.

Primary applications are open detection in integrated circuits, visualization of p-n junctions and localization of resistivity changes in via chains.

Though mainly used for semiconductor failure analysis, this tool can be used for any application that requires accurate measurement of low currents. It can be quickly and easily added to your existing MM3A-EM micromanipulator system.

• Current measurement limit: 10 fA
• Gain: 10e5 to 10e12 V/A
• Current leakage: < 50 fA/V
• Video output: 1 V / 50 Ohm
• External voltage input (triax)
• Large offset range
• AC and DC amplification modes
• Image inversion mode
• Individual and summed signals are possible

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.