Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.
The LT3310 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. Its smooth motion and rotational axis make it ideal for cell counting. In addition, the LT3310 is designed for nanomanipulation applications where weight and space are highly restricted and for high-precision work in extreme environments.
- Small and practical
- Plug-and-play system with modular design
- Interfacing solutions for most SEM/FIB instruments (including load lock)
- Fast setup and removal
- Result-oriented operation and increased throughput
- Intuitive control interfaces, user-friendly software and API support
- User-friendly and easy to learn
- Compact, stand-alone electronics with PC interface
- Pioneering cabling technology with compact vacuum feedthrough
- Compact construction delivers higher resonance frequencies
- Excellent stability
- Virtually insusceptible to vibrations
- Reliable operation (one year endurance test)
- Fast pre-positioning by hand
- Functions in extreme working environments
- No backlash or reversal play
- Sub-nanometer resolution (< 0.5 nm)
- Integrated coarse and fine displacement in one drive
- High operating velocity (up to 1 mm/sec)
- Low drift (1 nm/min)
- Smooth motion
X & Y = horizontal · Z = vertical · R = horizational rotation
- Length 33 mm
- Width 33 mm
- Height XY 11.6 mm
Height XYZ 30 mm + 7 mm travel
Height XYR 16.6 mm
- Weight XY 22 g
Weight XYZ 30 g
Weight XYR 28 g
- Travel XY 10 mm
Travel Z 7 mm
Travel R 360° unlimited
- Speed up to 1 mm/s
- Resolution XYZ < 0.5 nm
Resolution R 10e-7 rad
- Load 50 g
- Lift 25 g
- Temperature range 273 K to 353 K
UHV version 273 K to 393 K
Low temp. version 77 K (4 K*) to 393 K
- Lowest pressure 10e-7 mbar
UHV version 2 × 10e-10 mbar
- Substage mounting 4 × 2 mm holes
- Sample mounting 4 × M2 holes
- Material Stainless steel
* Requires special control unit.
All technical specifications are approximate. Due to continuous development,
we reserve the right to change specifications without notice.
