Over the last few years, the MM3A-EM micromanipulator has created an unparalleled new dimension of quality in the field of Electron Microscopy. It is employed in a wide spectrum of SEM, FIB and other microscopes for an even wider range of applications and it has become the industry standard for OEM and retrofit solutions.

Give your microscope a hand: use the MM3A-EM to add new capabilities and functionality to your instrument.

• Small and practical
• Plug-and-play system with modular components
• Interfacing solutions for most SEM/FIB instruments (including load lock)
• Fast setup and removal
• Effortless work with multiple manipulators
• Useful plug-in tools

• Result-oriented operation and increased throughput
• Intuitive control interfaces and software
• User-friendly and easy to learn
• Quick and easy probe tip exchange
• Compact, stand-alone electronics with PC interface
• Pioneering cabling technology with compact vacuum feedthrough

• Compact construction delivers higher resonance frequencies
• Excellent stability
• Low drift (1 nm/min)
• Reliable operation (one year endurance test)
• Virtually insusceptible to vibrations
• Fast pre-positioning by hand

• No backlash or reversal play
• Sub-nanometer resolution (0.25 nm)
• Extensive working range (100 cm³)
• No "blind axis" like with cartesian systems
• Integrated coarse and fine displacement in one drive
• High operating velocity (up to 10 mm/sec)

A = up / down  ·  B = left / right  ·  C = in / out

• Length  60 mm
• Width  22 mm
• Height  25 mm
• Weight  45 g
• Operating range AB  240°
  Operating range C  12 mm
• Piezo range A  4 × 10e-4 rad (20 µm)
  Piezo range B  4 × 10e-4 rad (15 µm)
  Piezo range C  1 µm
• Speed AB  up to 10 mm/s
  Speed C  up to 2 mm/s
• Resolution A  10e-7 rad (5 nm)
  Resolution B  10e-7 rad (3.5 nm)
  Resolution C  0.25 nm
• Holding force  1 N
• Holding torque  3 to 4 Nmm
• Lift Y  5 g
• Probing current range  10 nA to 100 mA
• Maximum probing voltage  100 V
• Probing signal resistance  7.0 Ω
• Temperature range  273 K to 353 K
  UHV version  273 K to 393 K
  Low temp. version  77 K (4 K*) to 393 K
• Lowest pressure  10e-7 mbar
  UHV version  2 × 10e-10 mbar
• Mounting  M4 tapped hole
• Material  Stainless steel, aluminium

* Requires special control unit

All technical specifications are approximate. Due to continuous development,
we reserve the right to change specifications without notice.