The MM3A-LMP micromanipulator is an economical and flexible alternative to conventional semiconductor probing instruments. Electrical measurements require probers to have low drift, high precision, a large working range and also to be insensitive to environmental conditions.
The MM3A-LMP outshines conventional probers in all these aspects. It is designed for measurements on 45 nm, 65 nm, 90 nm and larger technology and it offers unsurpassed stability, extreme precision and the flexibility to allow you to create your own prober station.
- Small and practical
- Plug-and-play system with modular components
- Interfacing solutions for all light microscopes and prober stations
- Fast setup and removal
- Effortless work with multiple manipulators
- Useful plug-in tools
- Result-oriented operation and increased throughput
- Intuitive control interfaces and software
- User-friendly and easy to learn
- Quick and easy probe tip exchange
- Compact, stand-alone electronics with PC interface
- Reduced interference due to pioneering cabling technology
- Compact construction delivers higher resonance frequencies
- Excellent stability
- Low drift (1 nm/min)
- Reliable operation (one year endurance test)
- Virtually insusceptible to vibrations
- Fast pre-positioning by hand
- No backlash or reversal play
- Sub-nanometer resolution (0.25 nm)
- Extensive working range (100 cm³)
- No "blind axis" like with cartesian systems
- Integrated coarse and fine displacement in one drive
- High operating velocity (up to 10 mm/sec)
A = up / down · B = left / right · C = in / out
- Length 60 mm
- Width 22 mm
- Height 25 mm
- Weight 45 g
- Operating range AB 240°
Operating range C 12 mm
- Piezo range A 4 × 10e-4 rad (20 µm)
Piezo range B 4 × 10e-4 rad (15 µm)
Piezo range C 1 µm
- Speed AB up to 10 mm/s
Speed C up to 2 mm/s
- Resolution A 10e-7 rad (5 nm)
Resolution B 10e-7 rad (3.5 nm)
Resolution C 0.25 nm
- Holding force 1 N
- Holding torque 3 to 4 Nmm
- Lift Y 5 g
- Probing current range 10 nA to 100 mA
- Maximum probing voltage 100 V
- Probing signal resistance 7.0 Ω
- Temperature range 273 K to 353 K
- Lowest pressure Not vacuum compatible
- Mounting Magnetic
- Material Stainless steel, aluminium
All technical specifications are approximate. Due to continuous development,
we reserve the right to change specifications without notice.
