- Length: 62.1 mm
- Width: 20.4 mm
- Height: 25.4 mm
- Weight: 45 g
- Operating range A & B: 240°
Operating range C: 12 mm
- Piezo range A: 4 × 10e-4 rad (20 µm)
Piezo range B: 4 × 10e-4 rad (15 µm)
Piezo range C: 1 µm
- Speed A & B: up to 10 mm/s
Speed C: up to 2 mm/s
- Resolution A: 10e-7 rad (5 nm)
Resolution B: 10e-7 rad (3.5 nm)
Resolution C: 0.25 nm
- Holding force: 1 N
- Holding torque: 3 to 4 Nmm
- Lift Y: 5 g
- Temperature range: 273 K to 353 K
- Lowest pressure: Not vacuum compatible
- Mounting: Magnetic
- Material: Stainless steel, aluminium
A = up / down · B = left / right · C = in / out
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.