nCount Shuttle

The innovative nCount Shuttle is an intuitive and cost-effective navigation and counting solution for arrays of periodical structures, for example DRAM, SRAM and TFT. It offers greater reliability and higher throughput than conventional techniques and will help you to reach your target quickly and easily. Watch the video to see how its done!

• Compatible with the load-lock systems of most SEMs and FIBs
• Intuitive control interfaces and software
• Compact, stand-alone electronics
• Excellent stability
• Low drift (1 nm/min)
• Reliable operation (one year endurance test)
• Virtually insusceptible to vibrations
• Sub-nanometer resolution
• No backlash or reversal play
• Coarse and fine displacement in one drive

• Travel: X and Y = 10 mm
• Travel: Z = 3 mm
• Speed: up to 1 mm/s
• Resolution: < 0.5 nm
• Cartesian movement
• No backlash or reversal play
• Coarse and fine displacement in one drive
• Simple load-lock solutions for most SEM and FIB tools
• Virtually insusceptible to vibrations

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.