Prober Shuttle

The Prober Shuttle is our latest tool for high-precision in-situ electrical probing. In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision - the MM4. The Prober Shuttle can be comprised of either two or four MM4s with the option of an ultra-flat two-axis or three-axis substage.

The entire height of the system is 9 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is compatible with our Safe Tip Approach module and our EBIC/RCI amplifier.

Compact & flexible

• Small and practical
• Plug-and-play system with modular components
• Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility)
• Fast setup and removal
• Pioneering cabling technology

Clear & simple

• Intuitive control interfaces and software
• User-friendly and easy to learn
• Quick and easy probe tip exchange
• Compact, stand-alone electronics
• Effortless work with multiple manipulators

Robust & stable

• Excellent stability
• Low drift (1 nm/min)
• Reliable operation (one year endurance test)
• Virtually insusceptible to vibrations
• Fast pre-positioning by hand

Fast & precise

• High operating velocity (up to 10 mm/sec)
• Sub-nanometer resolution (0.25 nm)
• No backlash or reversal play
• Extensive working range
• Coarse and fine displacement in one drive

Overview

• Total height: 10 mm
• Total width: 100 mm
• Maximum sample size: 20 mm — 20 mm — 1 mm
• Weight: 100 g + SEM/FIB dovetail

Next generation micromanipulators

A = left / right    B = up / down    C = in / out

• Operating range: A = 10 mm, B = 90°, C = 5 mm
• Resolution: A = < 0.5 nm, B = 5 nm, C = < 0.5 nm
• Low drift: 1 nm/min

Low-capacity, low-current measurements

• Noise: 300 fA @ 1 Hz
• Insulation leakage current: 50 fA @ 1 V
• Signal conductor resistance: 2 Ω
• Maximum voltage: 100 V
• Maximum current: 100 mA

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.