The PW-EM ProbeWorkstation is a powerful, dedicated system for electrical characterization of semiconductor devices and advanced materials.

The optimal combination of our nanomanipulation and probing products and a Keithley parameter analyzer provides you with a versatile, integrated solution for failure analysis and R&D applications requiring stable, low-current measurements.

The system is designed for measurements on 45 nm, 65 nm, 90 nm and larger technology and it offers unsurpassed stability, extreme precision and the flexibility to allow you to configure your probe workstation to meet your specific needs.

• Small and practical
• Plug-and-play system with modular components
• Interfacing solutions for most SEM/FIB instruments (including load lock)
• Fast setup and removal
• Effortless work with multiple manipulators

• Intuitive control interfaces and software
• User-friendly and easy to learn
• Quick and easy probe tip exchange
• Compact, stand-alone electronics
• Effortless work with multiple manipulators

• Excellent stability
• Low drift (1 nm/min)
• Reliable operation (one year endurance test)
• Virtually insusceptible to vibrations
• Fast pre-positioning by hand

• High operating velocity (up to 10 mm/sec)
• Sub-nanometer resolution (0.25 nm)
• No backlash or reversal play
• Extensive working range (100 cm³)
• Coarse and fine displacement in one drive