- PW-EM ProbeWorkstation
- Substage with four micromanipulators
- MM3A-EM Micromanipulator fitted with LCMK-EM low-current measurement kit and PT-30 probe needle
- LT12830 Substage
- Keithley 4200-SCS Semiconductor characterization system
- iProbe software (runs on the SEM PC or on a seperate laptop)