Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.

The LT12830 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.

It is built specifically for lithography, cell counting and failure analysis applications and contains two positional encoders per axis for automatic yaw error compensation.

Optional software for three-point alignment is available.

• Small and practical
• Plug-and-play system with modular design
• Interfacing solutions for most SEM/FIB instruments (including load lock)
• Fast setup and removal

• Result-oriented operation and increased throughput
• Intuitive control interfaces, user-friendly software and API support
• User-friendly and easy to learn
• Compact, stand-alone electronics with PC interface
• Pioneering cabling technology with compact vacuum feedthrough

• Compact construction delivers higher resonance frequencies
• Excellent stability
• Virtually insusceptible to vibrations
• Reliable operation (one year endurance test)
• Fast pre-positioning by hand
• Functions in extreme working environments

• No backlash or reversal play
• Sub-nanometer resolution (< 0.5 nm)
• Integrated coarse and fine displacement in one drive
• High operating velocity (up to 2 mm/sec)
• Low drift (1 nm/min)
• Smooth motion

• Length  128 mm
• Width  128 mm
• Height  15 mm
• Weight  490 g
• Travel XY  30 mm
• Speed  up to 2 mm/s
• Resolution  < 0.5 nm
• Repeatability  50 nm
• Angular deviation  < 1 µrad
• Load  500 g
• Temperature range  273 K to 353 K
  UHV version  273 K to 393 K
• Lowest pressure  10e-7 mbar
  UHV version  2 × 10e-10 mbar
• Substage mounting  4 × 3.2 mm holes
• Sample mounting  4 × M3 holes
• Material  Stainless steel

All technical specifications are approximate. Due to continuous development,
we reserve the right to change specifications without notice.