Existing devices for mechanical testing have either the necessary spatial or the necessary force resolution, but they rarely have both. Conventional AFM and nanoindentation-based systems are not usually suitable for in-situ testing. Micro-electro-mechanical systems (MEMS) usually only allow small displacements and conventional in-situ test rigs have insufficient displacement and force resolution. Another restriction of most systems is that they usually operate only in one predefined plane.

The MM3A-EM micromanipulator fitted with the FMS-EM plug-in tool can be used to overcome these limitations. Forces can be measured in a large working area in three planes of movement using a highly sensitive piezoresistive AFM tip.

The LT12830 substage is also an ideal tool for applications of this nature. It can be fitted with a force sensor, allowing measurements in two planes with direct positional feedback.