Recent Highlights:
nanoprobing @80V
- NanoProbing on 7 nm Technology at an Acceleration Voltage of only 80 V!
- Experimental setup consisting of an MM3A-EM micromanipulator equipped with a tool and the sample mounted to a SpringTable
- Experimental result: Cutting metal while monitoring the shear force
in situ sample heating and cooling
- FIB milling a box into a GaAs substrate. Left, at 30°C, "bleeding" is observed. Right, at -60°C, the effect is gone
Electron Beam Induced Voltage - 50-100 nV resolution!
- EBIV data superimposed on the corresponding SE image
Electron Beam Absorbed Current - fA noise level, pA resolution!
- EBAC data superimposed on the corresponding SE image
Waterless sample heating and cooling - down to -60°C!
- MHCS stage
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