Recent Highlights:

Electron Beam Induced Voltage - 50-100 nV resolution!

FIB milling a box into a GaAs substrate. Left, at 30°C, "bleeding" is observed. Right, at -60°C, the effect is gone

Electron Beam Induced Voltage - 50-100 nV resolution!

EBIV data superimposed on the corresponding SE image

Electron Beam Absorbed Current - fA noise level, pA resolution!

EBAC data superimposed on the corresponding SE image

Waterless sample heating and cooling - down to -60°C!

MHCS stage

The latest NanoController - now with 16 bit DAC for sub nm accuracy in all axes!

NC6