The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position. The system consists of a small four-axis substage mounted on a tilting platform. The substage offers a range of 10 mm by 10 mm in the X and Y directions and 3 mm in the Z direction. Additionally, the rotational axis allows unlimited rotation of the sample through 360 deg. The tilting platform is fitted with a positional encoder with a resolution of 0.1 deg.

• Electron Channel Contrast Imaging (ECCI)
• Electron Backscatter Diffraction (EBSD)
• Tomography
• ... any application that requires eucentric repositioning of samples

• Dimensions: Length 72 mm - Width 50 mm - Height 44 mm
• Travel: X and Y = 10 mm
• Travel: Z = 3 mm
• Travel: R = 360 deg (unlimited) - optionally with encoder
• Travel: T = ± 90 deg, with encoder
• Absolute accuracy: T < 0.4 deg (7x10^–3 rad)
• Absolute accuracy: R < 0.4 deg (7x10^–3 rad), if R-encoder is configured
• Repeatablity: T < 0.03 deg (4x10^–4 rad)
• Resolution: Linear axes < 0.05 nm
• Resolution: Rotational axes < 4 x 10^–7 deg (6.5 x 10^–9 rad)
• Speed: up to 1 mm/s
• Cartesian movement
• Drift < 1.5 nm/min
• No backlash or reversal play
• Coarse and fine displacement in one drive
• Virtually insusceptible to vibrations

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.