In-situ AFM

Have you ever wanted to get fast 3D information in SEM? The combination of Atomic Force Microscopy (AFM) and Scanning Electron Microscopes (SEM) opens exicting new possibilities. SEM™s are widely used for analytics in the micrometer and nanometer range and AFM techniques are useful for investigating the surfaces and characteristics of different materials down to nanometer details.

By using a compact and flexible AFM inside the SEM, information on lateral dimensions and material from SEM inspection can be complemented by precise topographical and force information. The unique and effortless availability of these two sets of data brings new value-added functionality to existing tools and reduces experiment cycle time, thereby increasing research throughput.