IPFA 2021 Best FA Paper Award! Low-Voltage EBIC Investigations of Fails

- NanoProbing on 7 nm Technology at an Acceleration Voltage of only 80 V!

- Experimental setup consisting of an MM3A-EM micromanipulator equipped with a tool and the sample mounted to a SpringTable

- Experimental result: Cutting metal while monitoring the shear force

- FIB milling a box into a GaAs substrate. Left, at 30°C, "bleeding" is observed. Right, at -60°C, the effect is gone

- EBIV data superimposed on the corresponding SE image

- EBAC data superimposed on the corresponding SE image

- MHCS stage