The FMS-EM is a compact force readout tool for the MM3A-EM micromanipulator. It enhances your system by allowing you to perform force measurements and nanoindentation.

Smallest outer dimensions are possible by means of a force readout system that requires no laser. Force feedback on the display of the FMS-EM controller is coupled with a loudspeaker to enable you to intuitively characterize materials and micromechanical structures by their resonance frequencies. Sharp silicon tips allow nanoindentation in a wide variety of materials.

The plug-in tool can be quickly and easily retrofitted to your existing MM3A-EM micromanipulator.

• Length  400 µm
• Width  50 µm
• Height  4 to 5 µm
• Tip radius  < 20 nm
• Tip height  > 5 µm
• Tip force constant (calculation)  2 to 4 N/m
• Maximum tip force  80 µN ¹
• Resistance  500 to 650 Ω
• Sensitivity  3.1 × 10e-3 mV/nm at Vbridge = 2.5 V ²
• Lowest pressure  10e-7 mbar

• Length  120 µm
• Width  50 µm
• Height  4 to 5 µm
• Tip radius  < 20 nm
• Tip height  > 5 µm
• Tip force constant (calculation)  30 to 40 N/m
• Maximum tip force  360 µN ¹
• Resistance  500 to 650 Ω
• Sensitivity  18.8 × 10e-3 mV/nm at Vbridge = 2.5 V ²
• Lowest pressure  10e-7 mbar

¹ Calculated with assumptive deflection of 10% and the lowest force constant.
² Dependent on the bias voltage (Vbridge) that is applied to the series resistance of sensor and reference.

All technical specifications are approximate. Due to continuous development,
we reserve the right to change specifications without notice.