Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.

The LT3310 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. Its smooth motion and rotational axis make it ideal for cell counting. In addition, the LT3310 is designed for nanomanipulation applications where weight and space are highly restricted and for high-precision work in extreme environments.

• Small and practical
• Plug-and-play system with modular design
• Interfacing solutions for most SEM/FIB instruments (including load lock)
• Fast setup and removal

• Result-oriented operation and increased throughput
• Intuitive control interfaces, user-friendly software and API support
• User-friendly and easy to learn
• Compact, stand-alone electronics with PC interface
• Pioneering cabling technology with compact vacuum feedthrough

• Compact construction delivers higher resonance frequencies
• Excellent stability
• Virtually insusceptible to vibrations
• Reliable operation (one year endurance test)
• Fast pre-positioning by hand
• Functions in extreme working environments

• No backlash or reversal play
• Sub-nanometer resolution (< 0.5 nm)
• Integrated coarse and fine displacement in one drive
• High operating velocity (up to 1 mm/sec)
• Low drift (1 nm/min)
• Smooth motion

X & Y = horizontal  ·  Z = vertical  ·  R = horizational rotation

• Length  33 mm
• Width  33 mm
• Height XY  11.6 mm
  Height XYZ  30 mm + 7 mm travel
  Height XYR  16.6 mm
• Weight XY  22 g
  Weight XYZ  30 g
  Weight XYR  28 g
• Travel XY  10 mm
  Travel Z  7 mm
  Travel R  360° unlimited
• Speed  up to 1 mm/s
• Resolution XYZ  < 0.5 nm
  Resolution R  10e-7 rad
• Load  50 g
• Lift  25 g
• Temperature range  273 K to 353 K
  UHV version  273 K to 393 K
  Low temp. version  77 K (4 K*) to 393 K
• Lowest pressure  10e-7 mbar
  UHV version  2 × 10e-10 mbar
• Substage mounting  4 × 2 mm holes
• Sample mounting  4 × M2 holes
• Material  Stainless steel

* Requires special control unit.

All technical specifications are approximate. Due to continuous development,
we reserve the right to change specifications without notice.