Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.

The LT6820 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.

It is designed specifically for lithography, cell counting and failure analysis applications and is fitted with positional encoders allowing 100 nm repeatability on the X and Y axes.

• Small and practical
• Plug-and-play system with modular design
• Interfacing solutions for most SEM/FIB instruments (including load lock)
• Fast setup and removal

• Result-oriented operation and increased throughput
• Intuitive control interfaces, user-friendly software and API support
• User-friendly and easy to learn
• Compact, stand-alone electronics with PC interface
• Pioneering cabling technology with compact vacuum feedthrough

• Compact construction delivers higher resonance frequencies
• Excellent stability
• Virtually insusceptible to vibrations
• Reliable operation (one year endurance test)
• Fast pre-positioning by hand
• Functions in extreme working environments

• No backlash or reversal play
• Sub-nanometer resolution (< 0.5 nm)
• Integrated coarse and fine displacement in one drive
• High operating velocity (up to 2 mm/sec)
• Low drift (1 nm/min)
• Smooth motion

X & Y = horizontal  ·  Z = vertical

• Length  68 mm
• Width  68 mm
• Height XY  26 mm
  Height XYZ  50 mm + 15 mm travel
• Weight XY  200 g
  Weight XYZ  270 g
• Travel XY  20 mm
  Travel Z  15 mm
• Speed  up to 2 mm/s
• Resolution  < 0.5 nm
• Encoder repeatability  100 nm *
• Angular deviation (undirectional)  < 10 µrad
• Load  500 g
• Lift  200 g
• Temperature range  273 K to 353 K
  UHV version  273 K to 393 K
• Lowest pressure  10e-7 mbar
  UHV version  2 × 10e-10 mbar
• Substage mounting  4 × 3.2 mm holes
• Sample mounting  4 × M3 holes
• Material  Stainless steel

* Repeatability depends on the working distance from the encoder due to the angular deviation of the substage.

All technical specifications are approximate. Due to continuous development,
we reserve the right to change specifications without notice.